Our Goals
Our research is dedicated to discovering novel multi-physics coupling phenomena in semiconductors by exploring the dynamics and interactions of quantum particles (such as electrons, holes, photons, and phonons), particularly at semiconductor interfaces (heterojunctions). These insights will drive the design and development of ultrasensitive physical sensors and innovative actuators for a wide range of applications, including Industry 4.0, IoT Smart Cities, automotive technologies, space exploration, healthcare, and precision agriculture.
Research Areas

Uncovering ultrasensitive physical sensing effects in semiconductors and nanomaterials by modulating charge carrier dynamics (electrons and holes) through interactions with various energy forms, such as photons, phonons, and mechanical energy.

We developed high performance and robust sensors based on Si and SiC MEMS technology, including Mechanical sensors (pressure sensors, accelerometers, gyroscopes, flow sensors), Optical sensors (photodetector, UV sensor, position sensor), Temperature, and Gas sensors.

Develop MEMS actuators and applications based on the electrostatic, electromagnetic, thermomechanical, and piezoelectric effects.