research
“Imagination is more important than knowledge. For knowledge is limited, whereas imagination embraces the entire world, stimulating progress, giving birth to evolution. It is, strictly speaking, a real factor in scientific research”
Research Areas
Dzung Dao' group research in MEMS and NEMS (Micro/Nano Electromechanical Systems), focusing on the following topics:
Aim at uncovering ultrasensitive physical sensing effects in semiconductors and nanomaterials by modulating charge carriers dynamics through interaction with various energy forms, e.g. photons, phonons, mechanical energy.
Design, simulate and fabricate Innovative Micro Sensors based on Si and SiC MEMS:
1. Mechanical sensors (pressure sensors, accelerometers, gyroscopes, flow sensors)
2. Optical sensors (photodetector, UV sensor, position sensor)
3. Temperature sensors
4. Gas sensors
5. Self-powered sensors
Develop robust mechanical and thermal sensors that can work in hostile conditions. The sensors are made from wide bandgap materials, such as SiC, GaN
Electrohydrodynamic spray systems for health and bio-delivery
Nanofiber materials and flexible electronics
Nanoparticles, aerosols, and respiratory medical devices
Develop micro and nano structures through top-down and bottom up processes, such as
Photolithography, Electron-beam lithography, Thinfilm deposition, Wet chemical etching, Plasma etching, etc
IoT sensor network for smart cities, infrastructure health monitoring, and natural disaster prevention
Develop MEMS actuators and applications based on the electrostatic, electromagnetic, thermomechanical, and piezoelectric effects.
Develop MEMS devices based on polymer materials
Develop Optical MEMS, e.g. photodetector, PSD, UV sensors.
Motion control, autonomous systems